55xD Micro Hole Drilling in Single Crystal Silicon Showerhead with Ultrasonic CNC
Silicon, Single-Crystal Silicon and Silicon Carbide are the most popular materials for semiconductor showerheads, which require many micro-deep holes. Laser is one common way to make the holes. However, the disadvantages of laser are also obvious, such as poor… Read More »55xD Micro Hole Drilling in Single Crystal Silicon Showerhead with Ultrasonic CNC
