ポリシリコンゲートリング加工
加工の優位性
✅ 超音波補助加工がより安定し、切削抵抗が低いため、加工効率が向上
✅ ワーク表面の粗さが低減
✅ 欠けやひび割れが低減
✅ 内円の真円度が効果的に向上
Carbon Silicon Showerhead Hole Drilling
Conprofe Benefits
✅ Continuously machining over 100 D0.5×6.5mm holes
(Depth-Diameter Ratio 13:1)
✅ Smooth hole wall and good hole quality (Hole chipping size <0.02mm)
炭化ケイ素スプレープレートの穴あけ加工
加工の優位性
✅ D0.5×6.5mmの穴を100個安定して連続的に加工
(アスペクト比13:1)
✅ 穴壁が滑らかであり、穴の開口部のチッピングが0.02mm以下
AlSiC Threaded Hole Machining
Conprofe Benefits
✅ Tool life improved by 300 times (54 holes/tool)
✅ Cycle time shortened by 90%, from 3600s/hole to 360s/hole
✅ Replacing manual operation to CNC thread milling
石英ガラススプレープレートの穴あけ加工
加工の優位性
✅ D0.5x5mmの穴を1,200個安定して連続的に加工可能(アスペクト比10:1)
✅ 穴一個当たりの加工時間は270秒から75秒まで72%短縮
✅ 穴壁が滑らかで、穴の開口部のチッピング量は0.4㎜から0.13mmへと68%減
Quartz Glass Showerhead Drilling
Conprofe Benefits
✅ Continuous drilling of 1,200 D0.5x5mm holes
✅ Cycle time reduced by 72%, from 270s to 75s per hole
✅ Hole edge chipping decreased by 68%, from 0.4mm to 0.13mm
Quartz Glass Substrate Chamfer & Side Machining
Conprofe Benefits
✅ 88% cycle time reduction, from 120min to 14.5min
✅ Qualified roughness without grinding marks
Single Crystal Silicon Showerhead Hole Drilling
Conprofe Benefits
✅ No chipping around hole edges
✅ Cycle time reduced by 50%, from 9min to 4.5min per hole
✅ Stable and continuous drilling of over 6,000 holes with one cutting tool
✅ Significant improvement of hole roundness and positional tolerance
単結晶シリコン曲面電極穴開け加工
加工の優位性
✅ PCDドリルはD0.45*24.75mmの微細超深穴を連続で2000個加工できる(アスペクト比55:1)
✅ ブラインド穴加工、穴の入口部はチッピングがないと目視で確認できる
✅ 穴の真円度が0.003㎜
✅ 穴壁の粗さは6.540μmから0.013μmへと99.8%低減