Cases by Machine Tools-Conprofe Technology Group Co., Ltd.

Cases by Materials

Hard-Brittle Materials Composite Materials Difficult-to-Cut Metals

Cases by Industries

Semiconductors Aviation & Aerospace Medical Automotive Consumer Electronics

Cases by Machine Tools

Engraving & Milling Centers Vertical 5-Axis Machining Centers 5-Axis Gantry Machining Centers Graphite Machining Centers Lightweight Vertical 5-Axis Machining Centers

Single Crystal Silicon Curved Electrode

Material: Single-crystal silicon

Machine tool: UEM-600

Industry: Semiconductors

Cutting tool: Solid PCD Drill

Features: D0.45x24.75mm ultra-deep micro-hole drilling

Benefits: Continuous machining of over 2,000 ultra-deep holes; Hole roundness up to 0.003mm; Hole wall roughness down by 99.8%, from Sa 6.540μm to Sa 0.013μm

Engineering Plastic Probe Card

Material: Engineering Plastic

Machine Tool: UEM-600

Industry: Semiconductors

Solution: Ultrasonic Machining System

Features: D0.22mm / D0.31mm Stepped Hole Drilling

Benefits: Stable micro-hole drilling for D0.22mm / D0.31mm holes; Entrance burrs reduced by 70%, from 0.095mm to 0.028mm; ATAN achieved: 25.462° (standard: 25.463°)

Polysilicon Confinement Ring

Material: Polysilicon

Machine Tool: UEM-600

Industry: Semiconductors

Solution: Vertical DDR High-Speed Rotary Table

Features: Contouring, grinding and grooving

Benefits: Edge chipping decreased by 75%, from 0.12mm to 0.03mm; Cycle time reduced by 21%, from 208h to 165h; Improved roundness

Showerhead

Material: Quartz Glass (HV700)

Machine Tool: UEM-600

Industry: Semiconductors

Cutting Tool: Solid PCD Drill

Features: D0.5x5.0mm Hole Drilling

Benefits: Continuous drilling of 1,200 D0.5x5mm holes (with depth-diameter ratio of 10:1) ; Cycle time reduced by 72%, from 270s to 75s per hole; Hole edge chipping decreased by 68%, from 0.4mm to 0.13mm

Substrate

Material: Quartz Glass

Machine Tool: UEM-400

Industry: Semiconductors

Cutting Tool: Solid PCD Micro-Edge Cutting Tool

Features: Chamfer and Side Machining (Required Roughness: Ra<150nm)

Benefits: Cycle time down by 79%, from 120min/pc to 25min/pc; Surface roughness down by 82%, from Ra 560nm to <100nm, without grinding marks

Showerhead

Material: Silicon Carbide (HV2,700)

Machine Tool: UEM-500

Industry: Semiconductors

Cutting Tool: Solid PCD Drill

Features: D0.5x6.5mm/D1x6.5mm Stepped Hole Drilling

Benefits: Continuously drilling over 100 holes; Smooth hole wall and hole edge chippings of less than 0.02mm

Wafer Disc

Material: Silicon Carbide

Machine Tool: UEM-500

Industry: Semiconductors

Cutting Tool: Solid PCD Micro-Edge Cutting Tool

Features: Cavity Grinding and Grooving

Benefits: Cutting force reduction with ultrasonic-assisted machining; Less chippings; Cycle time down by 48%, from 888 mins to 462 mins; Tool life up by 100%, from 159 mins to 317 mins

AlSiC Workpiece

Material: AISiC (60% SiC)

Machine Tool: UEM-400

Industry: Semiconductors

Cutting Tool: Solid PCD Drill + Thread Mill

Features: Thread Hole Drilling

Benefits: Wall thickness of 0.5mm without any cracks and chippings; Tool life improved by 800 times, from 1/4 hole to 200 holes

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