ポリシリコンゲートリング加工
加工の優位性
✅ 超音波補助加工がより安定し、切削抵抗が低いため、加工効率が向上
✅ ワーク表面の粗さが低減
✅ 欠けやひび割れが低減
✅ 内円の真円度が効果的に向上
Carbon Silicon Showerhead Hole Drilling
Conprofe Benefits
✅ Continuously machining over 100 D0.5×6.5mm holes
(Depth-Diameter Ratio 13:1)
✅ Smooth hole wall and good hole quality (Hole chipping size <0.02mm)
炭化ケイ素スプレープレートの穴あけ加工
加工の優位性
✅ D0.5×6.5mmの穴を100個安定して連続的に加工
(アスペクト比13:1)
✅ 穴壁が滑らかであり、穴の開口部のチッピングが0.02mm以下
Quartz Glass Optical Fibers Deep Hole Drilling
Conprofe Benefits
✅ Hole wall roughness 0.122~0.232μm with ultrasonic machining
✅ Hole parallelism <0.0385mm (vs. required<0.8μm)
Carbon-Ceramic Brake Machining
Benefits
✅ Improved surface quality with no obvious clipping, cracking, delamination or fiber pull-out
✅ Cycle time down by 47%, from 120 min to 64 min
Silicon Nitride Plate Cover & Cavity Machining
Benefits
✅ Cutting force reduction with ultrasonic machining
✅ Chipping decreases from 0.229mm to 0.02mm, 91%
✅ Significant improvement in roughness and yield
Graphite Mold Flat Machining
Benefits
✅ Surface roughness down by 81%, from 744nm to 139 nm
✅ Tool life increased by 3 times
Ultra-thin Glass Flat Surface Machining
Benefits
✅ Surface roughness Sa down by 52%, from 531nm to 254nm
✅ No cutter marks or cracks
Sapphire Through-Hole Sidewall Machining
Benefits
✅ Hole wall roughness improved from by 85%, 293nm to 46nm
✅ No need for polishing